Toh-Ming Lu 
Associate Director, Center for Integrated Electronics; Ray Palmer Baker Distinguished Professor; Professor of Physics
Contact:
(518) 276-2979
lut@rpi.edu
Home Page: http://www.rpi.edu/~lut/
Education:
Ph.D.,
University
of
Wisconsin
,
Madison
(Physics, 1976).
M.S., Worcester Polytechnic Institute (Physics, 1971).
B.S.,
Cheng Kung University
,
Taiwan
(Physics, 1968).
Career Highlights:
Dr. Lu joined RPI in 1982. He served as the Chairman of the Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute from 1992 to 1997. He was the Director of the Semiconductor Research Corporation (SRC), Center for Advanced Interconnect Science and Technologies (CAIST) from 1999 to 2005 where 13 universities, 25 faculty, and more than 40 graduate students are engaged in a nation-wide interdisciplinary research in microelectronics. His honors include the 2005 SRC Faculty Leadership Award and the 2004 Materials Research Society Medal Award. He is Fellow of four major societies: American Physical Society, American Vacuum Society, American Association for the Advancement of Sciences, and the Materials Research Society. Dr. Lu published over 400 papers, 6 books, 10 patents, and graduated 33 Ph.D. students, who have assumed leadership positions in semiconductor companies such as IBM, Intel, AMD, Motorola, Analog, GE, and Chartered Semiconductor.
Research Interests:
Surface, interface, and thin film morphologies, 3D integrated nano-structure formation; diffraction from imperfect surfaces, overlayers, dynamic growth fronts; growth and characterization of metal, ceramic, and polymeric thin films for nanoelectronics, photonics, and energy applications. Since '82, well funded research by NSF, DARPA, ARO, AFOSR, IBM, DEC, Kodak, Martin-Marietta, GE, Intel, Sheldahl, and AT&T.
Selected Publications:
1. C. Gaire et al. Epitaxial growth of CdTe thin film on cube-textured Ni by metal-organic chemical vapor deposition. Thin Soid Films 520, 1862–1865 (2012). doi:10.1016/j.tsf.2011.09.019
2. R. Krishnan et al. Vertically aligned biaxially textured molybdenum thin films. J. Appl. Phys. 110, 6, 064311 (2011). DOI: 10.1063/1.3638452.
3. Rahul Krishnan, Toh-Ming Lu, and Nikhil Koratkar. Functionally Strain-Graded Nanoscoops for High Power Li-Ion Battery Anodes. Nano Lett. 2011, 11, 377–384. dx.doi.org/10.1021/nl102981d.
4. Ming He, Pei-I Wang, and Toh-Ming Lu. Mechanism for the Formation of Isolated Poly(p-xylylene) Fibrous Structures under Shadowing Growth. Langmuir 27, 5107–5111 (2011). dx.doi.org/10.1021/la200520w
5. M. He et al. Bias-temperature stress of Al on porous low-k dielectrics.
Microelectron. Reliab.51, 8, 1342-1345 (2011). DOI:10.1016/j.microrel.2011.03.004.
|
